Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243763 | Substrate fixing device and electrostatic chuck | — | 2025-03-04 |
| 11942350 | Electrostatic chuck and substrate holding device | Mizuki Watanabe, Tomohiro Inoue | 2024-03-26 |
| 10998216 | Sintered body and electrostatic chuck | Michio Horiuchi | 2021-05-04 |
| 9418884 | Electrostatic chuck and semiconductor manufacturing device | Kazuyoshi Miyamoto | 2016-08-16 |