Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11021783 | Reactive sputtering apparatus and film formation method for composite metal compound film or mixture film using the same | — | 2021-06-01 |
| 9933159 | Oil diffusion pump and vacuum film formation device | — | 2018-04-03 |
| 6287430 | Apparatus and method forming thin film | Shigeharu Matsumoto, Kazuo Kikuchi, Yizhou Song, Takeshi Sakurai | 2001-09-11 |
| 5414506 | Method of measuring refractive index of thin film and refractive index measuring apparatus therefor | Toshinobu Ikeda, Akira Odagiri | 1995-05-09 |