Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7276427 | Method for manufacturing SOI wafer | Masashi Ichikawa, Takeshi Kobayashi | 2007-10-02 |
| 6861268 | Method for inspecting silicon wafer, method for manufacturing silicon wafer, method for fabricating semiconductor device, and silicon wafer | — | 2005-03-01 |