Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7256104 | Substrate manufacturing method and substrate processing apparatus | Masataka Ito, Kenji Yamagata, Yasuo Kakizaki, Hiroshi Miyabayashi, Ryuji Moriwaki +1 more | 2007-08-14 |
| 6969304 | Method of polishing semiconductor wafer | Kiyoshi Suzuki, Yoshinori Watanabe | 2005-11-29 |