Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7256104 | Substrate manufacturing method and substrate processing apparatus | Masataka Ito, Kenji Yamagata, Kazuhito Takanashi, Hiroshi Miyabayashi, Ryuji Moriwaki +1 more | 2007-08-14 |
| 7008860 | Substrate manufacturing method | Masataka Ito | 2006-03-07 |
| 6326279 | Process for producing semiconductor article | Takao Yonehara, Nobuhiko Sato | 2001-12-04 |