Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9919962 | Polishing agent for synthetic quartz glass substrate | Daijitsu Harada, Masaki Takeuchi, Shuhei Ueda, Atsushi Watabe | 2018-03-20 |
| 9316902 | Photomask-forming glass substrate and making method | Daijitsu Harada, Mamoru Morikawa, Masaki Takeuchi | 2016-04-19 |
| 8551346 | Photomask-forming glass substrate and making method | Daijitsu Harada, Mamoru Morikawa, Masaki Takeuchi | 2013-10-08 |
| 8460061 | Method for producing large-size synthetic quartz glass substrate | Atsushi Watabe | 2013-06-11 |
| 8012563 | Large-size substrate | Daisuke Kusabiraki | 2011-09-06 |
| 7906256 | Recycling of large-size photomask substrate | Shuhei Ueda | 2011-03-15 |
| 7745071 | Large-sized glass substrate | Satoru Miharada, Shuhei Ueda, Atsushi Watabe, Masaki Tabata | 2010-06-29 |
| 7608542 | Large-size glass substrate for photomask and making method, computer-readable recording medium, and mother glass exposure method | Shuhei Ueda, Atsushi Watabe, Daisuke Kusabiraki | 2009-10-27 |
| 7588481 | Wafer polishing method and polished wafer | Toshinari Murai | 2009-09-15 |
| 7191618 | Large-sized substrate and method of producing the same | Satoru Miharada, Shuhei Ueda, Atsushi Watabe, Masaki Tabata | 2007-03-20 |
| 7183210 | Method for preparing large-size substrate | Daisuke Kusabiraki, Shuhei Ueda, Atsushi Watabe | 2007-02-27 |
| 6928837 | Silica glass substrates and their selection | Masaki Takeuchi, Atsushi Watabe, Tetsushi Tsukamoto | 2005-08-16 |
| 6869732 | Glass substrate for photomasks and preparation method | Masaki Takeuchi | 2005-03-22 |
| 6855908 | Glass substrate and leveling thereof | Masaki Takeuchi | 2005-02-15 |
| 6413682 | Synthetic quartz glass substrate for photomask and making method | Hisatoshi Otsuka | 2002-07-02 |