Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8647795 | Sputtering target material, silicon-containing film forming method, and photomask blank | Hideo Kaneko, Hiroki Yoshikawa | 2014-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8647795 | Sputtering target material, silicon-containing film forming method, and photomask blank | Hideo Kaneko, Hiroki Yoshikawa | 2014-02-11 |