Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668226 | 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same | Motoyuki Yamada | 1997-09-16 |
| 5618892 | 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same | Motoyuki Yamada | 1997-04-08 |
| 5523370 | Poly(para-T-butoxycarbonyloxystyrene) and method of making | Osamu Watanabe, Toru Nakanishi, Motoyuki Yamada, Fujio Yagihashi | 1996-06-04 |
| 5314931 | Resist compositions | Motoyuki Yamada, Osamu Watanabe, Fujio Yagihashi | 1994-05-24 |