MK

Meguru Kashida

SC Shin-Etsu Chemical Co.: 45 patents #65 of 2,176Top 3%
Overall (All Time): #65,910 of 4,157,543Top 2%
45
Patents All Time

Issued Patents All Time

Showing 26–45 of 45 patents

Patent #TitleCo-InventorsDate
5348919 High-packing silicon nitride powder and method for making Haruyoshi Kuwabara, Akio Otsuka, Yasuyuki Maki 1994-09-20
5327808 Method for the preparation of a frame-supported pellicle for photolithography Yoshihiko Nagata, Yuichi Hamada, Yoshihiro Kubota 1994-07-12
5326649 X-ray transmitting membrane for mask in x-ray lithography and method for preparing the same Yoshihiko Nagata, Hitoshi Noguchi 1994-07-05
5308567 Method for the preparation of a resin membrane Yoshihiro Kubota, Yoshihiko Nagata, Hitoshi Noguchi 1994-05-03
5300348 Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive Yoshihiro Kubota, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada, Shinichi Sato +1 more 1994-04-05
5286567 Pellicle for photolithographic mask Yoshihiro Kubota, Yoshihiko Nagata, Hitoshi Noguchi 1994-02-15
5254419 Method for dust-proofing in the manufacture of electronic devices and pellicle therefor Satoshi Watanabe, Toshinobu Ishihara, Yoshihiro Kubota, Ikuo Fukui 1993-10-19
5246802 X-ray permeable membrane for X-ray lithographic mask Yoshihiro Kubota, Yoshihiko Nagata, Hitoshi Noguchi 1993-09-21
5234609 X-ray permeable membrane for X-ray lithographic mask Yoshihiko Nagata, Hitoshi Noguchi 1993-08-10
5209996 Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same Yoshihiro Kubota, Yoshihiko Nagata 1993-05-11
5199055 X-ray lithographic mask blank with reinforcement Hitoshi Noguchi, Yoshihiko Nagata, Yoshihiro Kubota 1993-03-30
5139633 Film-forming on substrate by sputtering Yoshihiko Nagata, Hitoshi Noguchi 1992-08-18
5132366 Curable silicone composition Yasushi Yamamoto, Hiroki Konno, Hirofumi Kishita 1992-07-21
5118573 Magneto-optical recording medium Yoshio Tawara, Katsushi Tokunaga, Tadao Nomura, Yoshiaki Shimizu, Yoshihiro Kubota 1992-06-02
5098515 Method for the preparation of a silicon carbide-silicon nitride composite membrane for X-ray lithography Yoshihiro Kubota, Yoshihiko Nagata 1992-03-24
5089085 Silicon carbide membrane for X-ray lithography and method for the prepartion thereof Yoshihiro Kubota, Yoshihiko Nagata 1992-02-18
4983701 Silicone composition for rendering surfaces non-adherent Yasuaki Hara, Masahiko Ogawa 1991-01-08
4895761 Sheets with silicone-based surface-release film Yasuaki Hara 1990-01-23
4849491 Curable organopolysiloxane composition Masahiko Ogawa, Kenichi Isobe 1989-07-18
4726964 Method for imparting releasability to a substrate surface Kenichi Isobe, Hisashi Aoki, Yasuaki Hara, Kiyohiro Kondow 1988-02-23