Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558227 | Method for polishing a work and an apparatus for polishing a work | Mikio Nakamura, Takahiro Kida | 2003-05-06 |
| 4388140 | Apparatus for wet treatment of wafer materials | Yasuaki Nakazato, Yasushi Miyazaki, Makoto Osuga | 1983-06-14 |