Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6137115 | Film inspecting apparatus | Ryohei Kokawa, Makoto Shinohara | 2000-10-24 |
| 5518595 | Focused ion beam etching apparatus | — | 1996-05-21 |
| 5393985 | Apparatus for focusing an ion beam | Shinji Nagamachi | 1995-02-28 |