Issued Patents All Time
Showing 76–96 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579793 | Method of achieving high adhesion of CVD copper thin films on TaN Substrates | Wei Pan, David R. Evans, Sheng Teng Hsu | 2003-06-17 |
| 6576293 | Method to improve copper thin film adhesion to metal nitride substrates by the addition of water | Sheng Teng Hsu, David R. Evans | 2003-06-10 |
| 6576292 | Method of forming highly adhesive copper thin films on metal nitride substrates via CVD | David R. Evans, Sheng Teng Hsu | 2003-06-10 |
| 6537361 | Method of the synthesis and control of PGO spin-coating precursor solutions | Fengyan Zhang, Jer-Shen Maa, Sheng Teng Hsu | 2003-03-25 |
| 6534326 | Method of minimizing leakage current and improving breakdown voltage of polycrystalline memory thin films | Sheng Teng Hsu, Tingkai Li, Fengyan Zhang | 2003-03-18 |
| 6531371 | Electrically programmable resistance cross point memory | Sheng Teng Hsu | 2003-03-11 |
| 6503314 | MOCVD ferroelectric and dielectric thin films depositions using mixed solvents | Tingkai Li, Sheng Teng Hsu | 2003-01-07 |
| 6472337 | Precursors for zirconium and hafnium oxide thin film deposition | David R. Evans | 2002-10-29 |
| 6457479 | Method of metal oxide thin film cleaning | Fengyan Zhang, Sheng Teng Hsu, Tingkai Li | 2002-10-01 |
| 6441417 | Single c-axis PGO thin film on ZrO2 for non-volatile memory applications and methods of making the same | Fengyan Zhang, Yanjun Ma, Jer-Shen Maa, Sheng Teng Hsu | 2002-08-27 |
| 6420279 | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate | Yoshi Ono, Rajendra Solanki | 2002-07-16 |
| 6372034 | PGO solutions for the preparation of PGO thin films via spin coating | Jer-Shen Maa, Fengyan Zhang, Sheng Teng Hsu | 2002-04-16 |
| 6303502 | MOCVD metal oxide for one transistor memory | Sheng Teng Hsu, David R. Evans, Tingkai Li, Jer-Shen Maa | 2001-10-16 |
| 6288420 | Composite iridium-metal-oxygen barrier structure with refractory metal companion barrier | Fengyan Zhang, Sheng Teng Hsu, Jer-Shen Maa | 2001-09-11 |
| 6281377 | Substituted cycloalkene new copper precursors for chemical vapor deposition of copper metal thin films | Tue Nguyen, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2001-08-28 |
| 6245261 | Substituted phenylethylene precursor and synthesis method | Tue Nguyen, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2001-06-12 |
| 6204176 | Substituted phenylethylene precursor deposition method | Lawrence J. Charneski, Sheng Teng Hsu | 2001-03-20 |
| 6190963 | Composite iridium-metal-oxygen barrier structure with refractory metal companion barrier and method for same | Fengyan Zhang, Sheng Teng Hsu, Jer-Shen Maa | 2001-02-20 |
| 6090963 | Alkene ligand precursor and synthesis method | Tue Nguyen, Robert Barrowcliff, David R. Evans, Sheng Teng Hsu | 2000-07-18 |
| 6015918 | Allyl-derived precursor and synthesis method | Tue Nguyen, Greg Michael Stecker, David R. Evans, Sheng Teng Hsu | 2000-01-18 |
| 5994571 | Substituted ethylene precursor and synthesis method | Tue Nguyen, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 1999-11-30 |