Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825519 | Selectively deposited PGO thin film and method for forming same | Tingkai Li, Sheng Teng Hsu | 2004-11-30 |
| 6794198 | MOCVD selective deposition of c-axis oriented Pb5Ge3O11 thin films on high-k gate oxides | Tingkai Li, Sheng Teng Hsu, David R. Evans | 2004-09-21 |
| 6716645 | MFMOS capacitors with high dielectric constant materials | Tingkai Li, Sheng Teng Hsu, Hong Ying, Yanjun Ma | 2004-04-06 |
| 6716691 | Self-aligned shallow trench isolation process having improved polysilicon gate thickness control | David R. Evans, Sheng Teng Hsu, Douglas J. Tweet, Lisa Stecker | 2004-04-06 |
| 6627510 | Method of making self-aligned shallow trench isolation | David R. Evans, Sheng Teng Hsu, Douglas J. Tweet, Lisa Stecker | 2003-09-30 |
| 6566148 | Method of making a ferroelectric memory transistor | Sheng Teng Hsu, Tingkai Li | 2003-05-20 |
| 6555874 | Method of fabricating high performance SiGe heterojunction bipolar transistor BiCMOS on a silicon-on-insulator substrate | Sheng Teng Hsu, Douglas J. Tweet, Hong Ying | 2003-04-29 |
| 6503763 | Method of making MFMOS capacitors with high dielectric constant materials | Tingkai Li, Sheng Teng Hsu, Hong Ying, Yanjun Ma | 2003-01-07 |
| 6436587 | Method of making a multi-level reticle using bi-level photoresist, including a phase-shifted multi-level reticle | Gerald Maliszewski | 2002-08-20 |
| 6043164 | Method for transferring a multi-level photoresist pattern | Tue Nguyen, Sheng Teng Hsu, Jer-Shen Maa, Chien-Hsiung Peng | 2000-03-28 |
| 6020639 | Semiconductor wafer with removed CVD copper | Tue Nguyen, Masato Kobayashi | 2000-02-01 |
| 5936707 | Multi-level reticle system and method for forming multi-level resist profiles | Tue Nguyen, David R. Evans | 1999-08-10 |
| 5914202 | Method for forming a multi-level reticle | Tue Nguyen, David R. Evans | 1999-06-22 |
| 5906910 | Multi-level photoresist profile method | Tue Nguyen, David R. Evans | 1999-05-25 |
| 5897379 | Low temperature system and method for CVD copper removal | Tue Nguyen, Masato Kobayashi | 1999-04-27 |
| 5821169 | Hard mask method for transferring a multi-level photoresist pattern | Tue Nguyen, Chien-Hsiung Peng | 1998-10-13 |
| 5753417 | Multiple exposure masking system for forming multi-level resist profiles | — | 1998-05-19 |