Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6009828 | Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method | Takashi Tomita, Katsuhiko Nomoto, Yoshihiro Yamamoto, Hitoshi Sannomiya | 2000-01-04 |
| 5618758 | Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method | Takashi Tomita, Katsuhiko Nomoto, Yoshihiro Yamamoto, Hitoshi Sannomiya | 1997-04-08 |