Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5487786 | Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder | Atsushi Chida, Katsuhiko Nomoto, Hiroshi Okamoto, Yoshihiro Yamamoto | 1996-01-30 |