Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8372760 | Method and system for using ion implantation for treating a low-k dielectric film | Kenneth Duerksen | 2013-02-12 |
| 7252777 | Method of forming an in-situ recessed structure | Sidlgata V. Sreenivasan, David C. Wang | 2007-08-07 |
| 5756256 | Silylated photo-resist layer and planarizing method | Tatsuo Nakato | 1998-05-26 |
| 5486424 | Silylated photoresist layer and planarizing method | Tatsuo Nakato | 1996-01-23 |
| 5403685 | Lithographic process for producing small mask apertures and products thereof | Hiroki Tabuchi | 1995-04-04 |
| 5370969 | Trilayer lithographic process | — | 1994-12-06 |
| 4806453 | Positive acting bilayer photoresist development | Michael Walter Legenza, Jeffery L. Vincent | 1989-02-21 |