Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9323052 | Lithography pupil shaping optical system and method for generating off-axis illumination mode | Fang Zhang, Jing Zhu, Huijie Huang, Qiang Song, Baoxi Yang +4 more | 2016-04-26 |