Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9334583 | Method of preventing auto-doping during epitaxial layer growth by cleaning the reaction chamber with hydrogen chloride | Chao Zhang, Zhitang Song, Bo Liu, Guanping Wu, Ting Zhang +2 more | 2016-05-10 |
| 8476085 | Method of fabricating dual trench isolated epitaxial diode array | Chao Zhang, Zhitang Song, Bo Liu, Guanping Wu, Ting Zhang +2 more | 2013-07-02 |
| 7989228 | Method and structure for sample preparation for scanning electron microscopes in integrated circuit manufacturing | Liqi Guo, Eugene Wang | 2011-08-02 |