Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10261426 | Optimization method and system for overlay error compensation | Jian Wang | 2019-04-16 |
| 8823936 | Structure for critical dimension and overlay measurement | Jian Wang, Zhibiao Mao | 2014-09-02 |