Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5985494 | Metrological structures particularly for direct measurement of errors introduced by alignment systems | Samuele Carrera, Giovanni Rivera | 1999-11-16 |
| 5622796 | Process for producing metrological structures particularly for direct measurement of errors introduced by alignment systems | Samuele Carrera, Giovanni Rivera | 1997-04-22 |
| 5246539 | Process for producing metrological structures particularly useful for analyzing the accuracy of instruments for measuring alignment on processed substrates | Carlo Lietti, Giovanni Rivera | 1993-09-21 |