Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9224658 | Membrane-based sensor device with non-dielectric etch-stop layer around substrate recess | Cyrill Kuemin, Rene Hummel | 2015-12-29 |
| 8815623 | Method for manufacturing an intergrated pressure sensor | Johannes Buhler, Felix Mayer, Matthias Streiff, Rene Hummel | 2014-08-26 |
| 7704774 | Pressure sensor having a chamber and a method for fabricating the same | Felix Mayer, Johannes Buhler, Matthias Streiff | 2010-04-27 |
| 7696749 | Resonator-based magnetic field sensor | Oliver Brand, Tobias A. Vancura | 2010-04-13 |