Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816422 | Pressure sensor | Chung-Hsien Lin, Ulrich Bartsch, Marion Hermersdorf, Tsung Lin Tang, Wang Su +1 more | 2020-10-27 |
| 10712218 | Pressure sensor | Johannes Schumm, Andreas Reinhard, Thomas Kraehenbuehl, Stefan Thiele, Chung-Hsien Lin +3 more | 2020-07-14 |
| 10254185 | Pressure sensor | Johannes Schumm, Andreas Reinhard, Thomas Kraehenbuehl, Stefan Thiele, Chung-Hsien Lin +3 more | 2019-04-09 |
| 10161817 | Reduced stress pressure sensor | Felix Mayer, Marc Von Waldkirch, Johannes Buhler, Stephan Braun, Marion Hermersdorf +1 more | 2018-12-25 |
| 9958349 | Pressure sensor | Johannes Schumm, Andreas Reinhard, Thomas Kraehenbuehl, Stefan Thiele, Chung-Hsien Lin +3 more | 2018-05-01 |
| 9581512 | Pressure sensor with deformable membrane and method of manufacture | Chung-Hsien Lin, Ulrich Bartsch, Marion Hermersdorf, Tsung Lin Tang, Wang Su +1 more | 2017-02-28 |
| 9224658 | Membrane-based sensor device with non-dielectric etch-stop layer around substrate recess | Robert Sunier, Cyrill Kuemin | 2015-12-29 |
| 9140740 | Sensor chip and method for manufacturing a sensor chip | Ralph Steiner-Vanha, Ulrich Bartsch | 2015-09-22 |
| 8815623 | Method for manufacturing an intergrated pressure sensor | Johannes Buhler, Felix Mayer, Matthias Streiff, Robert Sunier | 2014-08-26 |
| 8633047 | Method for manufacturing a sensor chip | Ralph Steiner-Vanha, Ulrich Bartsch | 2014-01-21 |
| 7900496 | Method and device for calibration sensors | Felix Mayer, Mathias Deschler, Urs Rothacher | 2011-03-08 |
| 7901971 | Method for manufacturing a sensor device with a stress relief layer | Werner Hunziker, Franziska Brem | 2011-03-08 |
| 7281405 | Method and device for calibration sensors | Felix Mayer, Mathias Deschler, Urs Rothacher | 2007-10-16 |