TK

Tetsuya Kakehata

SL Semiconductor Energy Laboratory: 59 patents #170 of 1,113Top 20%
Overall (All Time): #39,792 of 4,157,543Top 1%
59
Patents All Time

Issued Patents All Time

Showing 26–50 of 59 patents

Patent #TitleCo-InventorsDate
8828844 Manufacturing method of SOI substrate Hideto Ohnuma, Akihisa Shimomura, Shinya Sasagawa, Motomu Kurata 2014-09-09
8823063 SOI substrate, method for manufacturing the same, and semiconductor device Hideto Ohnuma, Yoichi Iikubo 2014-09-02
8815657 Method of manufacturing semiconductor device Suguru OZAWA, Atsuo Isobe, Takashi Hamada, Junpei Momo, Hiroaki Honda +1 more 2014-08-26
8633542 SOI substrate and manufacturing method thereof Hideto Ohnuma, Yoshiaki Yamamoto, Kenichiro Makino 2014-01-21
8581332 Semiconductor device and manufacturing method thereof Tamae Takano, Shunpei Yamazaki 2013-11-12
8535965 Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film Shinji Maekawa, Yuuichi Takehara 2013-09-17
8470648 Method for manufacturing semiconductor device Shunpei Yamazaki, Hideto Ohnuma 2013-06-25
8420504 Method for manufacturing semiconductor device Sho Kato, Fumito Isaka, Hiromichi Godo, Akihisa Shimomura 2013-04-16
8390067 Substrate for manufacturing semiconductor device and manufacturing method thereof Kazutaka KURIKI 2013-03-05
8273611 Method for manufacturing semiconductor substrate Kazutaka KURIKI 2012-09-25
8236668 Method for manufacturing SOI substrate Hideto Ohnuma, Takashi SHINGU, Kazutaka KURIKI, Shunpei Yamazaki 2012-08-07
8227866 Semiconductor substrate and semiconductor device and manufacturing method of the same 2012-07-24
8227805 Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film Shinji Maekawa, Yuuichi Takehara 2012-07-24
8207045 Method for manufacturing SOI substrate Kazutaka KURIKI 2012-06-26
8114722 Manufacturing method of semiconductor device 2012-02-14
8034694 SOI substrate, method for manufacturing the same, and semiconductor device Hideto Ohnuma, Yoichi Iikubo 2011-10-11
8030169 SOI substrate and manufacturing method thereof Hideto Ohnuma, Yoshiaki Yamamoto, Kenichiro Makino 2011-10-04
8022469 Semiconductor device and manufacturing method thereof Tamae Takano, Shunpei Yamazaki 2011-09-20
7994022 Semiconductor substrate and semiconductor device and manufacturing method of the same 2011-08-09
7989315 Method for manufacturing semiconductor device Takashi Kudo 2011-08-02
7955995 Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film Tetsuhiro Tanaka, Yoshinobu Asami 2011-06-07
7875532 Substrate for manufacturing semiconductor device and manufacturing method thereof Kazutaka KURIKI 2011-01-25
7851332 Semiconductor device and method for manufacturing the same Shunpei Yamazaki, Junichi Koezuka 2010-12-14
7851279 Manufacturing method of semiconductor device Tamae Takano, Shunpei Yamazaki 2010-12-14
7842584 Method for manufacturing semiconductor device Sho Kato, Fumito Isaka, Hiromichi Godo, Akihisa Shimomura 2010-11-30