Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8535965 | Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film | Shinji Maekawa, Tetsuya Kakehata | 2013-09-17 |
| 8227805 | Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film | Shinji Maekawa, Tetsuya Kakehata | 2012-07-24 |
| 7416928 | Manufacturing method of semiconductor device | Tetsuya Kakehata, Yasuhiro Jinbo | 2008-08-26 |
| 7274038 | Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film | Shinji Maekawa, Tetsuya Kakehata | 2007-09-25 |