Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8247315 | Plasma processing apparatus and method for manufacturing semiconductor device | Makoto Furuno, Taichi Nozawa, Mitsuhiro Ichijo, Ryota Tajima, Shunpei Yamazaki | 2012-08-21 |