Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8557687 | Method for forming microcrystalline semiconductor film and method for manufacturing thin film transistor | Ryota Tajima, Tetsuhiro Tanaka, Ryo Tokumaru, Hidekazu Miyairi, Mitsuhiro Ichijo | 2013-10-15 |
| 8247315 | Plasma processing apparatus and method for manufacturing semiconductor device | Makoto Furuno, Tetsuo Sugiyama, Mitsuhiro Ichijo, Ryota Tajima, Shunpei Yamazaki | 2012-08-21 |