Issued Patents All Time
Showing 76–87 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8476638 | Plasma CVD apparatus | Satoshi Toriumi, Ryota Tajima, Takashi Ohtsuki, Tetsuhiro Tanaka, Ryo Tokumaru +4 more | 2013-07-02 |
| 8404001 | Method for manufacturing positive electrode and power storage device | — | 2013-03-26 |
| 8390067 | Substrate for manufacturing semiconductor device and manufacturing method thereof | Tetsuya Kakehata | 2013-03-05 |
| 8344378 | Thin film transistor and method for manufacturing the same | Miyako Nakajima, Hidekazu Miyairi, Toshiyuki Isa, Erika Kato, Mitsuhiro Ichijo +1 more | 2013-01-01 |
| 8273611 | Method for manufacturing semiconductor substrate | Tetsuya Kakehata | 2012-09-25 |
| 8252669 | Method for manufacturing microcrystalline semiconductor film by plasma CVD apparatus | Satoshi Toriumi, Ryota Tajima, Takashi Ohtsuki, Tetsuhiro Tanaka, Ryo Tokumaru +4 more | 2012-08-28 |
| 8236668 | Method for manufacturing SOI substrate | Hideto Ohnuma, Takashi SHINGU, Tetsuya Kakehata, Shunpei Yamazaki | 2012-08-07 |
| 8207045 | Method for manufacturing SOI substrate | Tetsuya Kakehata | 2012-06-26 |
| 8114760 | Method for manufacturing microcrystalline semiconductor and thin film transistor | Mitsuhiro Ichijo, Tomokazu Yokoi, Toshiya Endo | 2012-02-14 |
| 7875532 | Substrate for manufacturing semiconductor device and manufacturing method thereof | Tetsuya Kakehata | 2011-01-25 |
| 7763502 | Semiconductor substrate, method for manufacturing semiconductor substrate, semiconductor device, and electronic device | Tetsuya Kakehata | 2010-07-27 |
| 7696058 | Method for manufacturing SOI substrate | Tetsuya Kakehata | 2010-04-13 |