Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9450139 | Manufacturing method of semiconductor film, manufacturing method of semiconductor device, and manufacturing method of photoelectric conversion device | Tetsuhiro Tanaka | 2016-09-20 |
| 9443989 | Manufacturing method of semiconductor film, manufacturing method of semiconductor device, and manufacturing method of photoelectric conversion device | Tetsuhiro Tanaka | 2016-09-13 |
| 9048327 | Microcrystalline semiconductor film, method for manufacturing the same, and method for manufacturing semiconductor device | Tetsuhiro Tanaka, Takashi Ienaga, Ryu Komatsu, Ryota Tajima, Yasuhiro Jinbo | 2015-06-02 |
| 9018109 | Thin film transistor including silicon nitride layer and manufacturing method thereof | Hidekazu Miyairi, Kunihiko Suzuki | 2015-04-28 |
| 8956934 | Thin film transistor and method for manufacturing the same | Miyako Nakajima, Hidekazu Miyairi, Toshiyuki Isa, Mitsuhiro Ichijo, Kazutaka KURIKI +1 more | 2015-02-17 |
| 8916425 | Method for forming microcrystalline semiconductor film and method for manufacturing semiconductor device | Ryota Tajima, Tetsuhiro Tanaka, Takashi Ohtsuki, Ryo Tokumaru, Yuji Egi +1 more | 2014-12-23 |
| 8828859 | Method for forming semiconductor film and method for manufacturing semiconductor device | Tetsuhiro Tanaka, Ryo Tokumaru, Takashi Ohtsuki, Ryota Tajima | 2014-09-09 |
| 8344378 | Thin film transistor and method for manufacturing the same | Miyako Nakajima, Hidekazu Miyairi, Toshiyuki Isa, Mitsuhiro Ichijo, Kazutaka KURIKI +1 more | 2013-01-01 |