Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315708 | Apparatus for treating substrate | Ju Yong JANG, Hiroaki Hori | 2025-05-27 |
| 12181504 | Apparatus and method for inspecting electrostatic chuck | Ga Yeon Kim, Sung Ho Lee, Ju Yong JANG | 2024-12-31 |
| 11967491 | Method and apparatus for parts cleaning | Soon Cheon Cho, Youngran Ko, Juyong Jang | 2024-04-23 |
| 11505493 | Method of treating surface of quartz member and quartz member obtained by same | — | 2022-11-22 |
| 7108750 | Thinning agent supplying systems | — | 2006-09-19 |