Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417897 | Plasma processing apparatus and plasma processing method using the same | Yoon Seok Choi, Sang Jeong LEE, Hyun Woo JO, Jong Won Park | 2025-09-16 |
| 11967491 | Method and apparatus for parts cleaning | Su Hyung Lee, Youngran Ko, Juyong Jang | 2024-04-23 |
| 10981184 | Coating apparatus and coating method | Bongkyu Shin, Hyun-Joong Kim | 2021-04-20 |
| 10622226 | Method and apparatus for cleaning component of substrate processing apparatus | Bongkyu Shin, Byeol Han, Hyun-Joong Kim | 2020-04-14 |
| 6843587 | Surface light source apparatus, and method and apparatus for manufacturing the same | Deuk-il Park, Sang Mook Kim, Ok-Bin Sur, Choong Yop Rhew, Min Ho Kim +2 more | 2005-01-18 |