Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957517 | Substrate treating apparatus and temperature control method for gas distribution plate | Yunsik Ju, Sangbo Seo | 2021-03-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957517 | Substrate treating apparatus and temperature control method for gas distribution plate | Yunsik Ju, Sangbo Seo | 2021-03-23 |