Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957517 | Substrate treating apparatus and temperature control method for gas distribution plate | Yunsik Ju, Byeong Hyeon KONG | 2021-03-23 |
| 9928862 | Loop shaping methods and devices for disturbance observer in servo control systems | Sung Won Park | 2018-03-27 |
| 9601143 | Disturbance observer with energy reducing filter | Sung Won Park | 2017-03-21 |
| 9536553 | Decoupled disturbance estimator in dual-stage servo controller with loop-shaping filter | Yunsik Ju, Minsu Jang, Jiwon Cha | 2017-01-03 |