Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670408 | Thin film capacitor with small leakage current and method for fabricating the same | Shintaro Yamamichi | 1997-09-23 |
| 5539613 | Compact semiconductor device including a thin film capacitor of high reliability | Shintaro Yamamichi, Toshiyuki Sakuma | 1996-07-23 |
| 5530279 | Thin film capacitor with small leakage current and method for fabricating the same | Shintaro Yamamichi | 1996-06-25 |
| 5498561 | Method of fabricating memory cell for semiconductor integrated circuit | Toshiyuki Sakuma | 1996-03-12 |
| 5332684 | Method for fabricating thin-film capacitor with restrained leakage current at side and end portions of electrodes in a semiconductor integrated circuit device | Shintaro Yamamichi, Toshiyuki Sakuma | 1994-07-26 |
| 5122923 | Thin-film capacitors and process for manufacturing the same | Shogo Matsubara | 1992-06-16 |
| 5084438 | Electronic device substrate using silicon semiconductor substrate | Shogo Matsubara, Sadahiko Miura | 1992-01-28 |
| 5053917 | Thin film capacitor and manufacturing method thereof | Shogo Matsubara | 1991-10-01 |
| 4456850 | Piezoelectric composite thin film resonator | Takeshi Inoue | 1984-06-26 |