Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815054 | Ultra-thin, corrosion resistant, hydrogenated carbon overcoats by combined sputtering and PECVD | Wen-Hong Liu, Taesun Kim, Chung Shih | 2004-11-09 |
| 6749729 | Method and apparatus for workpiece biassing utilizing non-arcing bias rail | Weilu Xu, Sam Vi Luong | 2004-06-15 |
| 5830331 | Apparatus and method for sputtering carbon | Taesun Kim, Hyung-Jin Lee, John Bruno, Robert B. Zubeck, Dennis R. Hollars | 1998-11-03 |