Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6156154 | Apparatus for etching discs and pallets prior to sputter deposition | Paul Stephen McLeod | 2000-12-05 |
| 5830331 | Apparatus and method for sputtering carbon | Taesun Kim, Hyung-Jin Lee, Yao-Tzung Roger Shih, Robert B. Zubeck, Dennis R. Hollars | 1998-11-03 |