Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096493 | Substrate treatment apparatus, and substrate treatment method | Akiyoshi Aomatsu, Kazuki Nakamura, Yoshinori Izumi, Nobutaka Tanahashi | 2018-10-09 |
| 9601358 | Substrate treatment apparatus, and substrate treatment method | Akiyoshi Aomatsu, Kazuki Nakamura, Yoshinori Izumi, Nobutaka Tanahashi | 2017-03-21 |
| 9555436 | Substrate treating apparatus and substrate treatment method for discharging treatment solution from nozzle to substrate | Tatsuhiko Kawaguchi | 2017-01-31 |