Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096493 | Substrate treatment apparatus, and substrate treatment method | Shoji Uemae, Kazuki Nakamura, Yoshinori Izumi, Nobutaka Tanahashi | 2018-10-09 |
| 9601358 | Substrate treatment apparatus, and substrate treatment method | Shoji Uemae, Kazuki Nakamura, Yoshinori Izumi, Nobutaka Tanahashi | 2017-03-21 |