Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802550 | Heat treatment method for heating substrate by irradiating substrate with flash of light | — | 2014-08-12 |
| 8686320 | Heat treatment apparatus emitting flash of light | — | 2014-04-01 |
| 8592727 | Heat treatment apparatus emitting flash of light | — | 2013-11-26 |
| 8513574 | Heat treatment apparatus emitting flash of light | — | 2013-08-20 |
| 8498525 | Heat treatment apparatus and method for heating substrate by light irradiation | Hiroki Kiyama | 2013-07-30 |
| 8355624 | Susceptor for heat treatment and heat treatment apparatus | Ippei Kobayashi, Yoshio Ito, Akio Wada | 2013-01-15 |
| 8173937 | Heat treatment apparatus emitting flash of light | — | 2012-05-08 |
| 8145046 | Heat treatment apparatus and method for heating substrate by light irradiation | Hiroki Kiyama | 2012-03-27 |
| 8041198 | Heat treatment apparatus and method for heating substrate by photo-irradiation | Hiroki Kiyama | 2011-10-18 |
| 7965927 | Heat treatment apparatus and heat treatment method | Jun Watanabe | 2011-06-21 |