Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5372916 | X-ray exposure method with an X-ray mask comprising phase shifter sidewalls | Taro Ogawa, Kozo Mochiji, Seiichi Murayama, Hiroaki Oizumi, Takashi Soga +1 more | 1994-12-13 |
| 4987345 | Charged particle source of large current with high energy | Hans Peter Stormberg, Yoshio Watanabe | 1991-01-22 |
| 4841556 | Plasma X-ray source | Yasuo Kato, Yoshio Watanabe, Seiichi Murayama | 1989-06-20 |