Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8597985 | MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads | Christopher Nordquist, Roy H. Olsson, Tracy C. Peterson, Randy J. Shul, Catalina Ahlers +2 more | 2013-12-03 |
| 7335972 | Heterogeneously integrated microsystem-on-a-chip | — | 2008-02-26 |
| 6772513 | Method for making electro-fluidic connections in microfluidic devices | Gregory C. Frye-Mason, David Martinez, Ronald P. Manginell, Edwin J. Heller | 2004-08-10 |