Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5446587 | Projection method and projection system and mask therefor | Ho-young Kang, Cheol Kim, Seong-oon Choi, Chang-jin Sohn | 1995-08-29 |
| 5413898 | Method of forming a pattern on a substrate having a step change in height | Hak-Yong Kim | 1995-05-09 |
| 5155367 | Gas contamination-measuring apparatus for use with an ultraviolet-emitting laser source | — | 1992-10-13 |
| 5134058 | Method for forming a fine pattern on a semiconductor having a step therein | — | 1992-07-28 |