Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5985491 | Reflectors for photolithographic projection and related systems and methods | Cheol Kim | 1999-11-16 |
| 5978138 | Projection exposure systems | Ho-young Kang, Cheol Kim, Seong-oon Choi, Woo-Sung Han | 1999-11-02 |
| 5808796 | Projection method and projection system and mask therefor | Ho-young Kang, Cheol Kim, Seong-oon Choi, Woo-Sung Han | 1998-09-15 |
| 5725973 | Photo mask and method for manufacturing same | Woo-Sung Han | 1998-03-10 |
| 5726738 | Aperture for off-axis illumination and projection exposure apparatus employing the same | Cheol Kim, Woo-Sung Han | 1998-03-10 |
| 5661601 | Projection method and projection system and mask therefor | Ho-young Kang, Cheol Kim, Seong-oon Choi, Woo-Sung Han | 1997-08-26 |
| 5608576 | Projection method and projection system and mask therefor | Woo-Sung Han, Ho-young Kang, Cheol Kim, Seong-oon Choi | 1997-03-04 |
| 5585210 | Mask pattern of a semiconductor device and a method of manufacturing fine patterns using the same | Dong-Seon Lee, Woo-Sung Han, Gee-Hoo Kim | 1996-12-17 |
| 5547788 | Mask and method for manufacturing the same | Woo-Sung Han | 1996-08-20 |
| 5446587 | Projection method and projection system and mask therefor | Ho-young Kang, Cheol Kim, Seong-oon Choi, Woo-Sung Han | 1995-08-29 |