Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735427 | Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor | Jin Ho Shin, Nam Hoon Lee, Dong-Eog Kim, Seung-Hun Oh, Eun-Seok Lee +1 more | 2023-08-22 |
| 11222786 | Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device | Jin Ho Shin, Nam Hoon Lee, Dong-Eog Kim, Seung-Hun Oh, Eun-Seok Lee +1 more | 2022-01-11 |