Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461937 | Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, Keum-Joo Lee, In-Seak Hwang, Young-sun Koh, Dong-Ho Ahn +1 more | 2002-10-08 |
| 6331469 | Trench isolation structure, semiconductor device having the same, and trench isolation method | Moon-han Park, Kyung Won Park, Han-Sin Lee | 2001-12-18 |
| 6258726 | Method of forming isolation film for semiconductor devices | Yu-Gyun Shin, Han-Sin Lee, Kyung Won Park | 2001-07-10 |
| 6107143 | Method for forming a trench isolation structure in an integrated circuit | Han-Sin Lee, Yu-Gyun Shin | 2000-08-22 |
| 6083808 | Method for forming a trench isolation in a semiconductor device | Yu-Gyun Shin, Han-Sin Lee, Moon-han Park | 2000-07-04 |
| 5985034 | Opening filling apparatus for manufacturing a semiconductor device | — | 1999-11-16 |
| 5966614 | Silicon nitride-free isolation methods for integrated circuits | Ho-Kyu Kang | 1999-10-12 |
| 5902127 | Methods for forming isolation trenches including doped silicon oxide | — | 1999-05-11 |
| 5858842 | Methods of forming combined trench and locos-based electrical isolation regions in semiconductor substrates | — | 1999-01-12 |
| 5858858 | Annealing methods for forming isolation trenches | Moon-han Park, Yu-Gyun Shin, Han-Sin Lee | 1999-01-12 |
| 5824562 | Manufacturing method for filling a trench or contact hole in a semiconductor device | — | 1998-10-20 |
| 5567645 | Device isolation method in integrated circuits | Sung Tae Ahn | 1996-10-22 |