Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681219 | Resist composition | Yechan KIM, Su Min Kim, Ju Young Kim, Jinjoo KIM, Hyunwoo KIM +3 more | 2023-06-20 |
| 11662662 | Photo-decomposable compound, photoresist composition including the same, and method of manufacturing integrated circuit device | Hyunji SONG, Sukkoo HONG, Sumin Kim, Yechan KIM, Juyoung Kim +3 more | 2023-05-30 |
| 11069580 | Method of manufacturing a semiconductor device including a plurality of channel patterns | Jeongho MUN, Naery Yu, Sumin Kim | 2021-07-20 |
| 10312074 | Method of producing layer structure, layer structure, and method of forming patterns | Min Soo Kim, Hyun-Ji SONG, Sun-Hae Kang, Sung Min Kim, Sung Hwan Kim +15 more | 2019-06-04 |
| 9676892 | Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition | Myeong-koo Kim, Ahreum Choi, Boodeuk Kim, Jungsik Choi | 2017-06-13 |