Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096476 | Composition for manufacturing semiconductor device and method of manufacturing semiconductor device using the composition | Jin Young Park, Hyun-Woo Kim | 2018-10-09 |
| 9874812 | Methods of forming hardmask material film | Nae-ry Yu, Won Ki Lee, Hyun-Woo Kim, Song-se Yi, Min Soo Kim +2 more | 2018-01-23 |
| 9773673 | Composition for manufacturing semiconductor device and method of manufacturing semiconductor device using the composition | Jin Young Park, Hyun-Woo Kim | 2017-09-26 |
| 9676892 | Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition | Ahreum Choi, Boodeuk Kim, Songse YI, Jungsik Choi | 2017-06-13 |