Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794217 | Single crystal silicon micromirror and array | Noel C. MacDonald | 2004-09-21 |
| 6753638 | Electrostatic actuator for micromechanical systems | Scott G. Adams, Tim Davis, Scott A. Miller, Kevin A. Shaw, John Chong | 2004-06-22 |
| 6628041 | Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same | Noel C. MacDonald | 2003-09-30 |
| 6563106 | Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same | John E. Bowers, Roger Helkey, Charles M. Corbalis, Robert Kehl Sink, Noel C. MacDonald | 2003-05-13 |
| 6541831 | Single crystal silicon micromirror and array | Noel C. MacDonald | 2003-04-01 |