Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8343281 | Source gas supply unit, and deposition apparatus and method using the same | Jong-Won Hong, Heung-Yeol Na, Eu-Gene Kang, Seok Chang | 2013-01-01 |
| 8048783 | Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same | Yun-Mo Chung, Ki-Yong Lee, Jin-Wook Seo, Jong-Won Hong, Heung-Yeol Na +12 more | 2011-11-01 |
| 8048229 | Apparatus for depositing an organic layer and method for controlling a heating unit thereof | Do-Geun Kim, Seok-Heon Jeong | 2011-11-01 |
| 7905961 | Linear type deposition source | Do-Geun Kim, Hee-Cheol Kang | 2011-03-15 |