Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7108922 | Siloxane-based resin and interlayer insulating film formed using the same | Yi-Yeol Lyu, Jin Heong Yim, Hyun Dam Jeong, Joon Sung Ryu | 2006-09-19 |
| 7071540 | Siloxane-based resin and a semiconductor interlayer insulating film using the same | Yi-Yeol Lyu, Joon Sung Ryu, Jong Baek Seon | 2006-07-04 |
| 7014917 | Siloxane-based resin and interlayer insulating film for a semiconductor device made using the same | Yi-Yeol Lyu, Jin Heong Yim, Joon Sung Ryu | 2006-03-21 |
| 6933096 | Photosensitive polymer including fluorine, resist composition containing the same and patterning method using the resist composition | Kwang-Sub Yoon | 2005-08-23 |
| 6844134 | Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist composition comprising the same | Sang-jun Choi, Joo-tae Moon, Sang-Gyun Woo, Kwang-Sub Yoon | 2005-01-18 |
| 6800418 | Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same | Kwang-Sub Yoon, Sang-jun Choi, Sang-Gyun Woo | 2004-10-05 |