Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7622383 | Methods of forming conductive polysilicon thin films via atomic layer deposition and methods of manufacturing semiconductor devices including such polysilicon thin films | Ki-Hyun Hwang, Jin-Tae Noh, Hong Suk Kim, Sung-Hae Lee | 2009-11-24 |
| 7488694 | Methods of forming silicon nitride layers using nitrogenous compositions | Jae Young Ahn, Hee Seok Kim, Ju Wan LIM | 2009-02-10 |
| 7176533 | Semiconductor devices having contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus | Eun-Ae Chung, Myoung-Bum Lee, Young-Pil Kim, Bean-Jun Jin | 2007-02-13 |
| 6962876 | Method for forming a low-k dielectric layer for a semiconductor device | Jae Young Ahn, Hee Seok Kim, Jin-Tae No, Sang-Ryol Yang, Sung-Hae Lee +5 more | 2005-11-08 |
| 6858529 | Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus | Eun-Ae Chung, Myoung-Bum Lee, Young-Pil Kim, Bean-Jun Jin | 2005-02-22 |